Aromatic vinyl ether based reverse-tone step and flash imprint lithography

ABSTRACT

A molding composition and a method of forming an pattern. The method includes forming on a substrate a molding layer of a molding composition of aromatic divinyl ethers; pressing the template into the molding layer, the template having a relief pattern, the molding layer filling voids in the relief pattern, the template not contacting the substrate; exposing the molding layer to actinic radiation, the actinic radiation converting the molding layer to a cured molding layer having thick and thin regions corresponding to the relief pattern; removing the template; filling the thin regions of the relief pattern with a backfill material; removing regions of the molding layer not protected by the backfill material to expose regions of the substrate; forming trenches in the exposed regions of the substrate; and removing any remaining molding layer and backfill material. A transfer layer may be used between the molding layer and the substrate.

This application is a continuation of U.S. patent application Ser. No.11/426,363 filed on Jun. 26, 2006, now abandoned.

FIELD OF THE INVENTION

This invention relates to processes for step and flash imprintlithography and materials for use in step and flash imprint lithography.

BACKGROUND OF THE INVENTION

Imprint lithography has emerged in various forms as a potentialalternative to conventional photolithography because of its ability toprint smaller features at low cost. Step and flash imprint lithography(SFIL) is a variant of imprint lithography that is amenable to theresolution and overlay requirements necessary for the fabrication ofadvanced semiconductor devices. In SFIL, a low-viscosity photosensitivemolding material is molded between a mechanically rigid template havinga relief pattern and a substrate and then is exposed to actinicradiation. The resulting hardened layer, having a three dimensionalpattern, can be used as an etch mask to transfer the imprinted patterninto the substrate below.

To form an effective etch mask with nanoscale features, it is oftendesirable to form patterned features with a large height-to-width aspectratio. Fabricating templates and producing imprints with such aspectratios, however, can range from extremely challenging to impossible,especially as the imprinted features approach nanometer-scaledimensions. To alleviate this problem, in SFIL, a so-called bilayer etchmask approach is employed. In this approach a silicon-containing organicmaterial is imprinted on an underlying silicon-free organic layer thatcovers the substrate of interest. Because organic materials can beanisotropically plasma-etched in a highly selective manner with respectto silicon-containing organic materials, the imprinted pattern can betransferred into the underlying transfer layer to form high-aspect ratiofeatures that can be used as an etch mask to transfer the imprintedpattern into the substrate.

Unfortunately, imprint lithography intrinsically possesses acharacteristic that complicates the process just described. Whenproducing an imprint, the molding or imprint material cannot be fullyexcluded between the template and the substrate. As a result, a hardenedlayer, called the residual layer, remains between the imprintedfeatures. To effectively transfer the imprinted pattern into theunderlying transfer layer, the residual layer must be removed. Removingthe residual layer inevitably alters or damages the shape and/or thesize of the imprinted features. This problem worsens as the thickness oruniformity variations of the residual layer approaches or exceeds theheight of the imprinted features.

To minimize these problems associated with the residual layer, aso-called reverse-tone SFIL (SFIL-R) process was developed. In theSFIL-R approach, a non-silicon containing organic material is imprintedover a non-silicon containing organic transfer layer. After all theimprints on the substrate have been produced, the substrate is coatedand cured with a silicon-containing material that ideally forms a planarsurface over the imprint topography. Using plasma etch techniques andchemistries known in the art, the thickness of this silicon-containingplanarizing overcoat is reduced until the tops of the imprinted featuresare exposed. Again, because organic materials can be anisotropicallyplasma-etched in a highly selective manner with respect tosilicon-containing organic materials, the non-silicon containingimprinted features can be selectively removed along with the non-siliconcontaining transfer layer material directly beneath them. The remainingpattern, which now has the opposite or reverse tone of the originallyimprinted pattern, can serve as an etch mask to transfer this reversetone pattern into the substrate.

In current practice, current SFIL-R formulations and processes aresensitive to the presence oxygen, have relatively low curing rates, highvolatility, high viscosity, and low tensile strength, which canadversely affect the quality of the imprint mask. In light of thesepotential disadvantages, there is a need in the art for alternativeSFIL-R formulations and SFIL-R processes that are less sensitive to thepresence oxygen, have relatively high curing rates, low volatility, lowviscosity and high tensile strength.

SUMMARY OF THE INVENTION

A first aspect of the present invention is a composition, comprising:one or more aromatic divinyl ethers; a photoacid generator; and astabilizing/sensitizing agent.

A second aspect of the present invention is a method, comprising:forming on a substrate, a molding layer of a molding composition, themolding composition comprising one or more aromatic divinyl ethers;pressing a surface of a template into the molding layer, the templatehaving a relief pattern on the surface, the molding layer filling voidsin the relief pattern, the template not contacting the substrate;exposing the molding layer to actinic radiation, the actinic radiationconverting the molding layer to a cured molding layer having thick andthin regions corresponding to the relief pattern; removing the template;filling the thin regions of the relief pattern with a backfill material;removing regions of the molding layer not protected by the backfillmaterial to expose regions of the substrate; forming trenches in theexposed regions of the substrate; and removing any remaining moldinglayer and backfill material.

A third aspect of the present invention is a method, comprising: formingon a substrate, a transfer layer of a transfer composition; forming onthe transfer layer, a molding layer of a molding composition, themolding composition comprising one or more aromatic divinyl ethers;pressing a surface of a template into the molding layer, the templatehaving a relief pattern on the surface, the molding layer filling voidsin the relief pattern, the template not contacting the transfer layer;exposing the molding layer to actinic radiation, the actinic radiationconverting the molding layer to a cured molding layer having thick andthin regions corresponding to the relief pattern; removing the template;filling the thin regions of the relief pattern with a backfill material;removing regions of the molding layer and the transfer layer notprotected by the backfill material to expose regions of the substrate;forming trenches in the exposed regions of the substrate; and removingany remaining molding layer, backfill material and transfer layer.

BRIEF DESCRIPTION OF THE DRAWINGS

The features of the invention are set forth in the appended claims. Theinvention itself, however, will be best understood by reference to thefollowing detailed description of illustrative embodiments when read inconjunction with the accompanying drawings, wherein:

FIGS. 1A through 1L are cross-sectional drawings illustrating a SFILprocess according to a first embodiment of the present invention;

FIGS. 2A through 2K are cross-sectional drawings illustrating a SFILprocess according to a second embodiment of the present invention; and

FIG. 3 is a scanning electron microscope image of an SFIL imprint imageformed according to the embodiments of the present invention.

DETAILED DESCRIPTION OF THE INVENTION

FIGS. 1A through 1L are cross-sectional drawings illustrating a SFILprocess according to embodiments of the present invention. In FIG. 1Aformed on a top surface of a substrate 100 (or a layer of a material tobe patterned on a substrate) is an optional first adhesion layer 105.Formed on a top surface of first adhesion layer 105 is a transfer layer110. Formed on a top surface of transfer layer 110 is an optional secondadhesion layer 115.

In one example, first adhesion layer 105 comprises hexamethyldisilazane(HMDS) or ethylsilicate, ethylorthosilicate, tetraalkoxysilane,aminoethylaminopropyltrialkoxysilane, aminopropyltrialkoxysilane,aminoethyltrialkoxysilane, tetraalkoxytitanate or combinations thereof.

First adhesion layer 105 need only be a few mono-layers thick and may beapplied by spin application of a dilute solution of the adhesionpromoting material(s) in a solvent, by vapor deposition or byincorporation into the material used to form transfer layer.

Transfer layer 110 is advantageously an organic polymer that etchesrapidly in an oxygen or in a reducing-chemistry anisotropic plasma etchprocess and slowly in a halocarbon-based anisotropic plasma etchprocess. In one example, transfer layer 110 may comprise a thermosettingpolymer, a thermoplastic polymer, a polyepoxy polymer, a polyamidepolymer, a polyimide polymer, a polyurethane polymer, a polycarbonatepolymer or a polyester polymer, and combinations thereof. Transfer layer110 may be spin applied from a solution of the transfer layer materialin an organic solvent. In the example that transfer layer 110 comprisespolyimide, an adhesion promoter such as HMDS may be added to a solutionof the polyimide polymer.

In one example, transfer layer 110 may comprise poly(vinylbenzoic acid)PVBA. PVBA can be prepared by conventional radical polymerization with2,2′-azobisisobutyronitrile (AIBN) or benzoyl peroxide (BPO) as theinitiator. PVBA has a high glass transition temperature, is soluble in2-ethoxyethanol, 2-methoxyethanol, 1-methoxy-2-propanol, and aqueousbase, and is insoluble in propylene glycol methyl ether acetate (PGMEA),cyclohexanone, and other common solvents. When transfer layer 110comprises PVBA, the transfer layer may be spin applied from castingsolution of PVBA in 2-ethoxyethanol, 2-methoxyethanol,1-methoxy-2-propanol or combinations thereof.

Second adhesion layer 115 may comprise the adhesion promoter materialrepresented by the structure (I):

wherein X is a linking group selected from the group consisting of—C(O)O—, —C(O)—, —OC(O)—, —O—C(O)—C(O)—O—, NHC(O)—O—, —O—C(O)—O—, alinear or a branched alkylene having 1 to 7 carbon atoms, acycloalkylene having 3 to 17 carbon atoms, an alkylcycloalkylene having4 to 20 carbon atoms and a cycloalkylalkylene having 4 to 20 carbonatoms;

wherein each R¹, R², R³, R⁴, R⁵, and R⁶ (R¹-R⁶) is independentlyselected from the group consisting of a hydrogen atom and a hydrocarbylsubstituent with a primary, a secondary or a tertiary carbon attachmentpoint, said hydrocarbyl group selected from the group consisting of analkyl group, an alkenyl group, an alkynyl group, an aralkyl group, analkaryl and an aryl group, each alkyl, alkenyl, alkynyl, aralkyl,alkaryl or aryl group having 1 to 20 carbon atom and each alkyl group ofthe aralkyl, or alkaryl groups may be linear, branched or cyclic; and

any two R¹-R⁶ in the same molecule may be linked to form at least onecarbon ring containing 3 to 8 carbon atoms.

In one example, the adhesion promoter isO-(vinyloxybutyl)-H-(triethoxysilylpropyl)-urethane (manufactured byGelest, Inc., 11 East Steel Road, Morrisville, Pa. 19067).

In FIG. 1B, a puddle of molding composition 120 is dispensed on a topsurface of adhesion layer 115 (or on a top surface of transfer layer 110if adhesion layer 115 is not used). In one example, puddle of moldingcomposition 120 is applied using drops of between about 1 micron andabout 200 microns in diameter.

In one example, the material of puddle of molding composition 120comprises at least one aromatic divinyl ether, examples of which include1,3-benzenedimethyl divinyl ether (structure II) and 1,3-benzenediethyldivinyl ether (structure III)

a photoacid generator (PAG), an optional stabilizer/sensitizer and anoptional release agent.

The molding composition advantageously includes a PAG. PAGs arecompounds that generate an acid upon exposure to radiation and willcause cross-linking or enhance cross-linking of the molding layer. Inone example between about 0.2 parts to about 10 parts of PAG is added tothe molding composition per 100 parts of molding material. Examples ofsuitable PAGs include but are not limited to:

sulfonium salts, examples of which include tolyldipenylsulfoniumtriflate, triphenylsulfonium perfluoromethanesulfonate(triphenylsulfonium triflate), triphenylsulfoniumperfluorobutanesulfonate, triphenylsulfonium perfluoropentanesulfonate,triphenylsulfonium perfluorooctanesulfonate, triphenylsulfoniumhexafluoroantimonate, triphenylsulfonium hexafluoroarsenate,triphenylsulfonium hexafluorophosphate, triphenylsulfonium bromide,triphenylsulfonium chloride, triphenylsulfonium iodide,2,4,6-trimethylphenyldiphenylsulfonium perfluorobutanesulfonate,2,4,6-trimethylphenyldiphenylsulfonium benzenesulfonate,tris(t-butylphenyl)sulfonium, diphenylethylsulfonium chloride, andphenacyldimethylsulfonium chloride;

halonium salts, particularly iodonium salts, examples of which includediphenyliodonium perfluoromethanesulfonate (diphenyliodonium triflate),diphenyliodonium perfluorobutanesulfonate, diphenyliodoniumperfluoropentanesulfonate, diphenyliodonium perfluorooctanesulfonate,diphenyliodonium hexafluoroantimonate, diphenyliodoniumhexafluoroarsenate, bis-(t-butylphenyl)iodonium triflate, andbis-(t-butylphenyl)-iodonium camphorsulfonate;

α,α′-bis-sulfonyl-diazomethanes, examples of which includebis(p-toluenesulfonyl)diazomethane, methylsulfonylp-toluenesulfonyldiazomethane,1-cyclohexylsulfonyl-1-(1,1dimethylethylsulfonyl) diazomethane, andbis(cyclohexylsulfonyl)diazomethane;

trifluoromethanesulfonate esters of imides and hydroxyimides, examplesof which include(trifluoromethylsulfonyloxy)-bicyclo[2.2.1]hept-5-ene-2,3-dicarboximide(MDT);

nitrobenzyl sulfonate esters, examples of which include as 2-nitrobenzylp-toluenesulfonate, 2,6-dinitrobenzyl p-toluenesulfonate, and2,4-dinitrobenzyl p-trifluoromethylbenzenesulfonate;

sulfonyloxynaphthalimides, examples of which includeN-camphorsulfonyloxynaphthalimide andN-pentafluorobenzenelsulfonyloxynaphthalimide;

pyrogallol derivatives (e.g., trimesylate of pyrogallol);

naphthoquinone-4-diazides;

alkyl disulfones;

s-triazine derivatives; and

miscellaneous sulfonic acid generators includingt-butylphenyl-α-(p-toluenesulfonyloxy)-acetate,t-butyl-α-(p-toluenesulfonyloxy)acetate, and N-hydroxynaphthalimidedodecane sulfonate (DDSN), and benzoin tosylate.

Examples of PAGs advantageously soluble in molding compositions based onaromatic divinyl ether, are represented by structures represented bystructures (IV) and (V):

wherein T_(f)=CF₃S(O)₂O—, and

wherein R=CF₂CF₂CF₂CF₂H, CF₃, or CF₂CF₃.

Structure (IV) is sensitive to 313 nm UV radiation and is insensitive toi-line (365 nm UV radiation). However, addition of about 15% by weight(relative to the weight of any PAG in the molding composition) of one ormore sensitizer/stabilizers, such as 9-anthracenemethanol (structureVI), or less than about 0.75% by weight (relative to the weight ofaromatic divinyl ethers in the molding composition) ofsensitizer/stabilizer added to the molding composition renders structure(IV) sensitive to 365 nm radiation.

Structure (V) is sensitive to 365 nm radiation and does not require asensitizer. However a sensitizer/stabilizer may be added as astabilizing agent for improved shelf-life.

Other suitable sensitizer/stabilizers may be used. In one example, theoptional sensitizer/stabilizer may be a substituted 9-anthracenemethanolhaving the structure (VII), phenothiazine, or a substitutedphenothiazine having the structure (VIII)

wherein each R⁷, R⁸, R⁹, R¹⁰, R¹¹, R¹², R¹³, R¹⁴, R¹⁵ and R¹⁶ (R⁷-R¹⁶)is independently selected from the group consisting of a hydrogen atomand a hydrocarbyl substituent with a primary, a secondary or a tertiarycarbon attachment point, said hydrocarbyl group selected from the groupconsisting of an alkyl group having 1 to 20 carbon atoms, an alkenylgroup having 1 to 20 carbon atoms, an alkynyl group having 1 to 20carbon atoms, an aralkyl group having 1 to 20 carbon atoms, an alkarylhaving 1 to 20 carbon atoms and an aryl group having 1 to 20 carbonatoms;

wherein the alkyl groups of the aralkyl and the alkaryl groups may belinear, branched or cyclic; and

wherein any two R⁷-R¹⁵ in the same molecule may be linked to form the atleast one carbon ring containing 3 to 8 carbon atoms. Phenothiazinesshould not be used with PAGs having structures V and VI or violentreactions may occur.

In order to facilitate release of the exposed molding layer from thetemplate (as described infra), materials with a low surface energy suchas fluorinated vinyl ethers and other fluorinated compounds can beoptionally included in the molding composition in amounts ranging fromabout 1% by weight of the molding composition to about 20% by weight ofthe molding composition. An example of a fluorinated vinyl ether isvinyl 2,2,2-trifluoroethyl ether. Another example of a fluorinated vinylether is structure (IX):

Other fluorinated vinyl ethers having the formula

(R¹⁷)(R¹⁸)═C(R¹⁹)OC_(n)(R²⁰)(R²¹)(D)(R²²)(R²³)(R²⁴), wherein D is acarbon atom, wherein n is 1, wherein R¹⁷, R¹⁸, R¹⁹, R²⁰ and R²¹ are H,and wherein R²², R²³ and R²⁴ are fluorine groups.

In FIG. 1C, a template 125 is aligned to substrate 100. Template 125includes a support portion 130 and a mold portion 135. Both support 130portion and mold portion 135 are transparent to the wavelength ofradiation that molding composition 120 is sensitive to (in one example313 nm and/or 365 nm). Mold portion 135 includes a relief pattern madeup of trenches (or grooves) 140 and plateaus (or lands) 145. An optionalrelease layer 150 may be applied to the bottom and sidewalls of trenches140 and plateaus 145. Alternatively template 125 may be monolithic andsupport portion 130 and mold portion 135 integral with each other.

In FIG. 1D, template 125 is pressed with a low pressure (i.e., less thanabout 1 psi) toward substrate 100, and the puddle of molding composition120 (see FIG. 1C) is spread out over second adhesion layer 115 (ortransfer layer 110, if the second adhesion layer is not used),completely filling trenches 140 between plateaus 145 and forming anuncured molding layer 120A. Plateaus 145 do not touch second adhesionlayer 115 (or transfer layer 110, if the second adhesion layer is notused) so molding layer 120A is a continuous layer having thick and thinregions. After exposure to actinic radiation (in this case UV light) andremoval of template 125, uncured molding layer 120A is converted to acured (i.e. cross-linked) molding layer 120B as depicted in FIG. 1E.

In FIG. 1E, cured molding layer comprises thin regions 155 and thickregions 160. When transfer layer 110 comprises a PVBA, second adhesionlayer 115 comprises a material having a trialkoxysilyl moiety and avinyl ether moiety (for example, structure I). The trialkoxysilyl moietyreacts with the carboxylic acid group of the transfer layer material andthe vinyl group of the adhesion layer material polymerizes with thevinyl ether groups of the molding layer material to covalently link thetransfer layer to the molding layer.

In a conventional SFIL process, a halocarbon-based anisotropic plasmaetch would be performed at this point to remove thin regions 155 andexpose adhesion layer 115 (or transfer layer 110). However, this is notrequired for the embodiments of the present invention, so the thicknessof thin region 155 can be thicker than in conventional SFIL processes.

In FIG. 1F, a backfill layer 175 is formed over cured molding layer120B, completely filling the space between thick regions 160 andcovering both thin regions 155 and thick regions 160.

In a first example, backfill layer 175 may comprise siloxane polymers,spin-on-glass (SOG) or organo silicate glass (OSG) materials includingsilsesquioxane resins (low molecular weight polymers or oligomers) whichmay be represented by the formulas —(SiO₂)n-, —(R′SiO_(3/2))n-,—(R′₂SiO)n- and —(R″Si₂O₃)n-, wherein R′ is selected from the groupconsisting of an alkyl group having 1 to 3 carbon atoms, an aryl grouphaving 6 to 12 carbon atoms, and a cycloalkyl group having 6 to 12carbon atoms, and wherein R″ is selected from the group consisting of analkylene group having 1 to 2 carbon atoms and a cycloalkylene grouphaving 6 to 12 carbon atoms.

In a second example, backfill layer 175 may comprise any polymercontaining at least 6 percent by weight of a metal such as silicon,germanium, tin, titanium or other Group IVA/IVB metals.

In a third example, backfill layer 175 comprises one or more siliconcontaining vinyl ethers such as CH₂═CHOCH₂Si(CH₃)₃,CH₂═CHOCH₂CH₂Si(CH₃)₃, CH₂═CHOCH₂Si(CH₃)₂CH₂OCH═CH₂,CH₂═CHOCH₂Si(CH₃)₂OSi(CH₃)₂CH₂OCH═CH₂,CH₂═CHOCH₂CH₂Si(CH₃)₂CH₂CH₂OCH═CH₂,CH(CH₃)═CHOCH₂Si(CH₃)(CH₂OCH═CH(CH₃))CH₂OCH═CH(CH₃),CH₂═CHOCH₂CH₂Si(Si(CH₃)₃)₃ and a suitable photoacid generator.

In a fourth example, backfill layer 175 comprises one or more siliconcontaining acrylates and a radical photoinitiator.

In FIG. 1G, an optional exposure (for backfill compositions comprisingsilicon containing vinyl ethers and a PAG, such as example 3 supra)actinic radiation is performed (in this case UV light) and backfilllayer 175 (see FIG. 1F) is converted to a cured (i.e., cross-linked)backfill layer 175A.

In FIG. 1H, cured backfill layer 175A (see FIG. 1G) or uncured backfilllayer 175 (see FIG. 1F) is thinned and planarized to form etch barrierislands 175B of cured or uncured backfill material thereby exposingcured molding layer 120B between the etch barrier islands. A top surface180 of cured molding layer 120B is coplanar with top surfaces 185 ofetch barrier islands 175B, or top surface 180 may be recessed below topssurfaces 185. In one example, if etch barrier islands 175B are formedfrom cured molding material, then the thinning and planarizing may beaccomplished by either CMP or a plasma etch. In one example, if etchbarrier islands 175B are formed from uncured molding material, then thethinning and planarizing may be accomplished by a plasma etch.

In FIG. 1I, an oxygen or reducing-chemistry anisotropic plasma etchprocess is performed to remove those portions of cured molding layer120B and second adhesion layer 115 not protected by etch barrier islands175B, thereby exposing the top surface of transfer layer 110.

In FIG. 1J, the oxygen or reducing-chemistry anisotropic plasma etchprocess of FIG. 1I is continued, to remove those portions of transferlayer 110 and first adhesion layer 105 not protected by etch barrierislands 175B, thus exposing the top surface of substrate 100. Cured etchbarrier islands 175B may be thinned by the oxygen or reducing-chemistryanisotropic plasma etch process (as shown in FIG. 1J), or alternativelythe cured etch barrier islands may be removed by the oxygen orreducing-chemistry anisotropic plasma etch process.

In FIG. 1K, a halocarbon-based anisotropic plasma etch is performed toetch trenches 190 into substrate 100 wherever substrate 100 is notprotected by transfer layer 110. Any remnants of cured etch barrierislands 175B (see FIG. 1G) not removed by the oxygen orreducing-chemistry anisotropic plasma etch process of FIG. 1G areremoved by the halocarbon-based anisotropic plasma etch.

In FIG. 1L, the remaining transfer layer 110 and first adhesion layer105 (see FIG. 1H) are removed using organic solvents such as2-ethoxyethanol, 2-methoxyethanol, 1-methoxy-2-propanol,N-methylpyrrolidone or an aqueous base when transfer layer 110 is PVBA.If transfer layer 110 comprises a thermosetting polymer, a thermoplasticpolymer, a polyepoxy polymer, a polyamide polymer, a polyimide polymer,a polyurethane polymer, a polycarbonate polymer or a polyester polymer,then plasma or acid removal processes are required.

Thus, the pattern of plateaus 145 of template 125 (see FIG. 1C) has beenconverted to a pattern of trenches 190 in substrate 100 (see FIG. 1I) ina negative imaging process in the first embodiment of the presentinvention without the use of a residual layer removal or pre-burningstep.

FIGS. 2A through 2K are cross-sectional drawings illustrating a SFILprocess according to a second embodiment of the present invention. InFIGS. 2A through 2J, adhesion layer 115 is optional and its compositionhas been described supra. FIG. 2A is similar to FIG. 1A, FIG. 2B issimilar to FIG. 1B, and FIG. 2C is similar to FIG. 1C, except there isno transfer layer or second adhesion layer and puddle of moldingcomposition 120 is formed on the top surface of adhesion layer 115 orthe top surface of substrate 100 if no adhesion layer is used. Anadvantage of using aromatic vinyl ethers in the molding composition isthat a single layer of material can serve as both the molding layer andthe transfer layer, eliminating the need to apply a separate aromatictransfer layer.

FIGS. 2D, 2E, 2F, 2G and 2H are similar to FIGS. 1D, 1E, 1F, 1G and 1Hrespectively. In reference to FIG. 2E, the triethoxysilyl moiety ofadhesion layer 115 (structure I) reacts with the —OH group on thesurface of substrate 100, and the vinyl ether moiety of structure (I) isco-polymerized into the molding layer 120B forming a covalent bondbetween the substrate and the cured layer.

In FIG. 21, an oxygen or reducing-chemistry anisotropic plasma etchprocess is performed to remove those portions of cured molding layer120B and adhesion layer 115 not protected by etch barrier islands 175B,thus exposing the top surface of substrate 100.

In FIG. 2J, a halocarbon RIE is performed to etch trenches 190 intosubstrate 100 wherever substrate 100 is not protected etch barrierislands 175B (or protected by cured molding layer 120B in the event allof the etch barrier island material is removed during the oxygen orreducing-chemistry anisotropic plasma etch process of FIG. 21 or duringthe current halocarbon-based anisotropic plasma etch). Even though etchbarrier islands 175B are thinned in FIG. 2J, any remnants of etchbarrier islands 175B not removed by the oxygen or reducing-chemistryanisotropic plasma etch process of FIG. 21 are removed by thehalocarbon-based anisotropic plasma etch of FIG. 2J.

In FIG. 2K, the cured molding layer 120B (see FIG. 2J) is removed usinga plasma or acid removal processes.

Thus, the pattern of trenches 140 of template 125 (see FIG. 2C) has beenconverted to a pattern of trenches 190 in substrate 100 (see FIG. 2L) ina negative imaging process in the second embodiment of the presentinvention without the use of a residual layer removal or a pre-burningstep and without the use of a transfer layer.

EXPERIMENTAL RESULTS Synthesis of 1,3-Benzenedimethyl Divinyl Ether

Synthesis of 1,3-Benzenedimethanol

To a two-liter, 3-necked round-bottomed flask equipped with a 500-mlconstant pressure addition funnel, an overhead stirrer, a thermocoupleand a nitrogen inlet was added 27 g (0.74 mol) of lithium aluminumhydride (95%) and 1000 ml of anhydrous tetrahydrofuran (THF). Theaddition funnel was charged with a solution of 100 g (0.493 mol) ofisophthaloyl dichloride in 400 ml of anhydrous THF. Diacylchloride wasadded slowly over a period of 2 hours with cooling in an ice bath. Onceaddition was complete the ice bath was removed and the suspensionallowed to reach room temperature for four hours at which time it wasre-cooled and 200 ml of ethyl acetate was slowly added to decompose theremaining hydride. The addition funnel was recharged with 200 ml of 2MNaOH, which was then added slowly with vigorous stirring until theensuing suspension became granular in appearance. The suspension wasfiltered and well washed with ethyl acetate. The combined filtrate andwashings were then washed with brine, dried over anhydrous magnesiumsulfate and evaporated on a rotary evaporator to yield 64 g (94%) of thetitle compound as a clear, colorless oil which solidified upon standing.

(2) Synthesis of 1,3-Benzenedimethyl Divinyl Ether

To a two-liter round bottomed flask equipped with a positive-pressurenitrogen inlet and a magnetic stir bar was added 64 g (0.46 mol) of1,3-benzenedimethanol, 10 g (0.03 mol) of mercuric acetate and 1 literof ethyl vinyl ether. The solution was stirred at room temperature forfour days at which time it was washed well with saturated sodiumbicarbonate solution and brine. The solution was then stirred for threedays over 20 g of anhydrous magnesium sulfate (the reaction is driven tocompletion by stirring over the acidic magnesium sulfate), filtered andevaporated on a rotary evaporator. The resulting oil was distilled twicethrough an 8″ Vigreux to yield 53 g (60%) of the title compound, boilingpoint=84° C. at 1 mm Hg. An additional 22 g of product was contaminatedwith the monovinyl ether intermediate.

Synthesis of 1,3-Benzenediethyl Divinyl Ether

Synthesis of 1,3-Benzenediethanol

To a two-liter, 3-necked round-bottomed flask equipped with a 500-mlconstant pressure addition funnel, an overhead stirrer, thermocouple andnitrogen inlet was added 16 g (0.42 mol) of lithium aluminum hydride(95%) and 800 ml of anhydrous THF. The addition funnel was charged witha solution of 40 g (0.21 mol) of 1,3-phenylenediacetic acid in 500 ml ofanhydrous THF. The diacid was added slowly over a period of 2 hours withcooling in an ice bath. Once addition was complete, the ice bath wasremoved and the suspension allowed to reach room temperature overnightafter which time it was re-cooled and 100 ml of ethyl acetate was slowlyadded to decompose the remaining hydride. The addition funnel wasrecharged with 200 ml of 2M NaOH, which was then added slowly withvigorous stirring until the ensuing suspension became granular inappearance. The suspension was filtered and well washed with ethylacetate. The combined filtrate and washings were then washed with brine,dried over anhydrous magnesium sulfate and evaporated on a rotaryevaporator to yield 21 g (62%) of the title compound as a clear,colorless oil.

1,3-Benzenediethyl Divinyl Ether

To a one-liter round bottomed flask equipped with a positive-pressurenitrogen inlet and a magnetic stir bar was added 21 g (0.13 mol) of1,3-benzenediethanol, 4 g (0.03 mol) of mercuric acetate and 750 ml ofethyl vinyl ether. The solution was stirred at room temperature for fourdays at which time it was washed well with saturated sodium bicarbonatesolution and brine. The solution was then stirred for three days over 20g of anhydrous magnesium sulfate (the reaction is driven to completionby stirring over the acidic magnesium sulfate) filtered and evaporatedon a rotary evaporator. The resulting oil was distilled twice through an8″ Vigreux to yield 12 g (43%) of the title compound, boiling point=98°C. at 1 mm Hg. An additional 8 g of product was contaminated with themonovinyl ether intermediate.

Imprinting Results

Structure (V) with R=CF₂CF₃ (0.03018 g) and 9-anthracenemethanol (0.0015gram) were dissolved in 1.0015 g of 1,3-benzenedimethyl divinyl ether. Asimilar formulation was prepared by replacing 20 wt % of the1,3-benzenedimethyl divinyl ether with 3,4,5,6-nonafluorohexyl vinylether. Both formulations were placed between two NaCl disks and weresubjected to infrared (IR) analysis to determine the degree of curing asa function of ultraviolet (UV) light dose. 1,3-Benzenediethyl divinylether was found to cure as rapidly as 1,3-benzenedimethyl divinyl ether.Both aromatic divinyl ethers have only negligible volatility at roomtemperature, which is a desirable property as SFIL materials.

A cured mixture of 1,3-benzenedimethyl divinyl ether and structure (V)with R=CF₂CF₃ was etched in an anisotropic fluorocarbon (CF₄) plasma at1.23 nm/sec, comparable to poly(4-vinylbenzoic acid) (1.3 nm/sec), whilea cured aliphatic divinyl ether showed a faster etch rate of 1.65nm/sec.

Imprinting of the 1,3-benzenedimethyl divinyl ether formulations withand without fluorinated vinyl ether hand-dispensed on an MolecularImprint tool was successful, generating 50 nm 1:1 line space patternswith an aspect ratio of about two as illustrated in FIG. 3.

FIG. 3 is a scanning electron microscope image of an SFIL imprint imageformed according to the embodiments of the present invention. The1,3-benzenedimethyl divinyl ether formulations had a viscosity of about1.6 cP and 50 nm wide line/space pairs were imprinted greater than 90 nmdeep.

Thus, the embodiments of the present invention provide alternativeSFIL-R formulations and SFIL-R process that are less sensitive to thepresence oxygen, have relatively high curing rates, low volatility, lowviscosity and high tensile strength.

The description of the embodiments of the present invention is givenabove for the understanding of the present invention. It will beunderstood that the invention is not limited to the particularembodiments described herein, but is capable of various modifications,rearrangements and substitutions as will now become apparent to thoseskilled in the art without departing from the scope of the invention.Therefore, it is intended that the following claims cover all suchmodifications and changes as fall within the true spirit and scope ofthe invention.

1. A method, comprising: forming on a substrate a molding layer of amolding composition, said molding composition comprising one or morearomatic divinyl ethers; pressing a surface of a template into saidmolding layer, said template having a relief pattern on said surface,said molding layer filling voids in said relief pattern, said templatenot contacting said substrate; exposing said molding layer to actinicradiation, said actinic radiation converting said molding layer to acured molding layer having thick and thin regions corresponding to saidrelief pattern; after exposing said molding layer to said actinicradiation, removing said template from said cured molding layer; afterremoving said template, filling said thin regions of said relief patternwith a backfill material; removing regions of said molding layer notprotected by said backfill material to expose regions of said substrate;forming trenches in said exposed regions of said substrate; and afterforming said trenches, removing any remaining molding layer and backfillmaterial.
 2. The method of claim 1, wherein said aromatic divinyl ethersare selected from the group consisting of


3. The method of claim 1, further including forming an adhesion layerbetween said substrate and said molding layer.
 4. The method of claim 3,wherein said adhesion layer comprises a material selected from the groupconsisting of (1) O-(vinyloxybutyl)-H-(triethoxysilylpropyl)-urethane,(2) materials having both a trialkoxysilyl moiety and a vinyl ethermoiety, (3)

wherein X is a linking group selected from the group consisting of—C(O)O—, —C(O)—, —OC(O)—, —O—C(O)—C(O)—O—, NHC(O)—O—, —O—C(O)—O—, alinear or a branched alkylene having 1 to 7 carbon atoms, acycloalkylene having 3 to 17 carbon atoms, an alkylcycloalkylene having4 to 20 carbon atoms and a cycloalkylalkylene having 4 to 20 carbonatoms; wherein each R¹, R², R³, R⁴, R⁵, and R⁶ (R¹-R⁶) is independentlyselected from the group consisting of a hydrogen atom and a hydrocarbylsubstituent with a primary, a secondary or a tertiary carbon attachmentpoint, said hydrocarbyl group selected from the group consisting of analkyl group, an alkenyl group, an alkynyl group, an aralkyl group, analkaryl and an aryl group, wherein each alkyl, alkenyl, alkynyl,aralkyl, alkaryl or aryl group has 1 to 20 carbon atoms and each alkylgroup of the aralkyl, or alkaryl groups may be linear, branched orcyclic; and any two R¹-R⁶ in the same molecule may be linked to form theat least one carbon ring containing 3 to 8 carbon atoms, and (4)combinations thereof.
 5. The method of claim 1, wherein said moldingcomposition further includes: a photoacid generator; and astabilizing/sensitizing agent.
 6. The method of claim 5, wherein saidphotoacid generator is selected from the group consisting of sulfoniumsalts, tolyldipenylsulfonium triflate, triphenylsulfoniumperfluoromethanesulfonate (triphenylsulfonium triflate),triphenylsulfonium perfluorobutanesulfonate, triphenylsulfoniumperfluoropentanesulfonate, triphenylsulfonium perfluorooctanesulfonate,triphenylsulfonium hexafluoroantimonate, triphenylsulfoniumhexafluoroarsenate, triphenylsulfonium hexafluorophosphate,triphenylsulfonium bromide, triphenylsulfonium chloride,triphenylsulfonium iodide, 2,4,6-trimethylphenyldiphenylsulfoniumperfluorobutanesulfonate, 2,4,6-trimethylphenyldiphenylsulfoniumbenzenesulfonate, tris(t -butylphenyl)sulfonium, diphenylethylsulfoniumchloride, and phenacyldimethylsulfonium chloride, halonium salts,iodonium salts, diphenyliodonium perfluoromethanesulfonate(diphenyliodonium triflate), diphenyliodonium perfluorobutanesulfonate,diphenyliodonium perfluoropentanesulfonate, diphenyliodoniumperfluorooctanesulfonate, diphenyliodonium hexafluoroantimonate,diphenyliodonium hexafluoroarsenate, bis-(t-butylphenyl)iodoniumtriflate, and bis-(t-butylphenyl)-iodonium camphorsulfonate, α, α′-bis-sulfonyl -diazomethanes, bis(p-toluenesulfonyl)diazomethane,methylsulfonyl p-toluenesulfonyldiazomethane,1-cyclohexylsulfonyl-(1-(1,1-dimethylethylsulfonyl) diazomethane, andbis(cyclohexylsulfonyl)diazomethane, trifluoromethanesulfonate esters ofimides and hydroxyimides,(trifluoromethylsulfonyloxy)-bicyclo[2.2.1]hept-5-ene-2,3-dicarboximide(MDT), nitrobenzyl sulfonate esters, 2-nitrobenzyl p-toluenesulfonate,2,6-dinitrobenzyl p-toluenesulfonate, and 2,4-dinitrobenzylp-trifluoromethylbenzenesulfonate, sulfonyloxynaphthalimides,N-camphorsulfonyloxynaphthalimide andN-pentafluorophenylsulfonyloxynaphthalimide, pyrogallol derivatives,trimesylate of pyrogallol, naphthoquinone-4-diazides, alkyl disulfones,s-triazine derivatives, sulfonic acid generators,t-butylphenyl-α-(p-toluenesulfonyloxy)-acetate,t-butyl-α-(p-toluenesulfonyloxy)acetate, N-hydroxy-naphthalimidedodecane sulfonate (DDSN), benzoin tosylate,

wherein T_(f)═CF₃S(O)₂O— and wherein R═CF₂CF₂CF₂CF₂H, CF₃, or CF₂CF₃. 7.The method of claim 5, wherein said stabilizing/sensitizing agent isselected from the group consisting of

substituted 9-anthracenemethanols, phenothiazine, substitutedphenothiazines,

wherein each R⁷, R⁸, R⁹, R¹⁰, R¹¹, R¹², R¹³R¹⁴, R¹⁵ and R¹⁶(R⁷-R¹⁶) isindependently selected from the group consisting of a hydrogen atom anda hydrocarbyl substituent with a primary, a secondary or a tertiarycarbon attachment point, said hydrocarbyl group selected from the groupconsisting of an alkyl group having 1 to 20 carbon atoms, an alkenylgroup having 1 to 20 carbon atoms, an alkynyl group having 1 to 20carbon atoms, an aralkyl group having 1 to 20 carbon atoms, an alkarylhaving 1 to 20 carbon atoms and an aryl group having 1 to 20 carbonatoms; wherein the alkyl groups of the aralkyl and the alkaryl groupsmay be linear, branched or cyclic; and wherein any two R⁷-R¹⁵ in thesame molecule may be linked to form the at least one carbon ringcontaining 3 to 8 carbon atoms.
 8. The method of claim 1, said moldingcomposition further including a fluorinated release agent selected fromthe group consisting of vinyl 2,2,2-trifluoroethyl ether,

(R¹⁷)(R¹⁸)═C(R¹⁹)OC_(n)(R²⁰)(R²¹)(D)(R²²)(R²³)(R²⁴), wherein D is acarbon atom, wherein n is 1, wherein R¹⁷, R¹⁸, R¹⁹, R²⁰ and R²¹ are H,and wherein R²², R²³ and R²⁴ are fluorine groups.
 9. The method of claim1, wherein said backfill material is selected from the group consistingof: (1) a siloxane polymer, spin-on-glass, spin-on-organo-silicate glasssilsesquioxanes having the formulas —(SiO₂)n-, —(R′SiO_(3/2))n-,—(R′₂SiO)n- and —(R″Si₂O₃)n-, wherein R′ is selected from the groupconsisting of an alkyl group having 1 to 3 carbon atoms, an aryl grouphaving 6 to 12 carbon atoms, and a cycloalkyl group having 6 to 12carbon atoms, and wherein R″ is selected from the group consisting of analkylene group having 1 to 2 carbon atoms and a cycloalkylene grouphaving 6 to 12 carbon atoms; (2) a polymer containing at least 6 percentby weight of silicon, germanium, tin, titanium or other Group IVA/IVBmetals; (3) one or more of CH₂═CHOCH₂Si(CH₃)₃, CH₂═CHOCH₂CH₂Si(CH₃)₃,CH₂═CHOCH₂Si(CH₃)₂CH₂OCH═CH₂, CH₂═CHOCH₂Si(CH₃)₂OSi(CH₃)₂CH₂OCH═CH₂,CH₂═CHOCH₂CH₂Si(CH₃)₂CH₂CH₂OCH═CH₂,CH(CH₃)═CHOCH₂Si(CH₃)(CH₂OCH═CH(CH₃))CH₂OCH═CH(CH₃),CH₂═CHOCH₂CH₂Si(Si(CH₃)₃)₃, other silicon containing vinyl ethers and aphotoacid generator; and (4) silicon containing acrylates and a radicalphotoinitiator.
 10. A method, comprising: forming on a substrate, atransfer layer of a transfer composition; forming on said transfer layera molding layer of a molding composition, said molding compositioncomprising one or more aromatic divinyl ethers; pressing a surface of atemplate into said molding layer, said template having a relief patternon said surface, said molding layer filling voids in said reliefpattern, said template not contacting said transfer layer; exposing saidmolding layer to actinic radiation, said actinic radiation convertingsaid molding layer to a cured molding layer having thick and thinregions corresponding to said relief pattern; after exposing saidmolding layer to said actinic radiation, removing said template fromsaid cured molding layer; after removing said template, filling saidthin regions of said relief pattern with a backfill material; removingregions of said molding layer and said transfer layer not protected bysaid backfill material to expose regions of said substrate; formingtrenches in said exposed regions of said substrate; and after saidforming said trenches, removing any remaining molding layer, backfillmaterial and transfer layer.
 11. The method of claim 10, wherein saidtransfer composition comprises a thermosetting polymer, a thermoplasticpolymer, a polyepoxy polymer, a polyamide polymer, a polyimide polymer,a polyurethane polymer, a polycarbonate polymer, a polyester polymer,poly(vinylbenzoic acid) or combinations thereof.
 12. The method of claim10, further including: forming a first adhesion layer between saidsubstrate and said transfer layer; or forming a second adhesion layerbetween said transfer layer and said molding layer; or forming both afirst adhesion layer between said substrate and said transfer layer andforming a second adhesion layer between said transfer layer and saidmolding layer.
 13. The method of claim 12 wherein (1) said adhesionlayer comprises a material selected from the group consisting ofhexamethyldisilazane (HMDS) or ethylsilicate, ethylorthosilicate,tetraalkoxysilane, aminoethylaminopropyltrialkoxysilane,aminopropyltrialkoxysilane, aminoethyltrialkoxysilane,tetraalkoxytitanate or combinations thereof; and (2) wherein said secondadhesion layer comprisesO-(vinyloxybutyl)-H-(triethoxysilylpropyl)-urethane or

wherein X is a linking group selected from the group consisting of—C(O)O—, —C(O)—, —OC(O)—, —O—C(O)—C(O)—O—, NHC(O)—O —, —O—C(O)—O—, alinear or a branched alkylene having 1 to 7 carbon atoms, acycloalkylene having 3 to 17 carbon atoms, an alkylcycloalkylene having4 to 20 carbon atoms and a cycloalkylalkylene having 4 to 20 carbonatoms, wherein each R¹, R², R³, R⁴, R⁵, and R⁶(R¹-R⁶) is independentlyselected from the group consisting of a hydrogen atom and a hydrocarbylsubstituent with a primary, a secondary or a tertiary carbon attachmentpoint, said hydrocarbyl group selected from the group consisting of analkyl group, an alkenyl group, an alkynyl group, an aralkyl group, analkaryl and an aryl group, wherein each alkyl, alkenyl, alkynyl,aralkyl, alkaryl or aryl group has 1 to 20 carbon atoms and each alkylgroup of the aralkyl, or alkaryl groups may be linear, branched orcyclic, and wherein any two R¹-R⁶ in the same molecule may be linked toform the at least one carbon ring containing 3 to 8 carbon atoms. 14.The composition of claim 10, wherein said aromatic divinyl ethers areselected from the group consisting of


15. The method of claim 10, wherein said molding composition furtherincludes: a photoacid generator; and a stabilizing/sensitizing agent.16. The method of claim 15, wherein said photoacid generator is selectedfrom the group consisting of sulfonium salts, tolyldipenylsulfoniumtriflate, triphenylsulfonium erfluoromethanesulfonate(triphenylsulfonium triflate), triphenylsulfoniumperfluorobutanesulfonate, triphenylsulfonium perfluoropentanesulfonate,triphenylsulfonium perfluorooctanesulfonate, triphenylsulfoniumhexafluoroantimonate, triphenylsulfonium hexafluoroarsenate,triphenylsulfonium hexafluorophosphate, triphenylsulfonium bromide,triphenylsulfonium chloride, triphenylsulfonium iodide,2,4,6-trimethylphenyldiphenylsulfonium perfluorobutanesulfonate,2,4,6-trimethylphenyldiphenylsulfonium benzenesulfonate, tris(t-butylphenyl)sulfonium, diphenylethylsulfonium chloride,phenacyldimethylsulfonium chloride, halonium salts, iodonium salts,diphenyliodonium perfluoromethanesulfonate (diphenyliodonium triflate),diphenyliodonium perfluorobutanesulfonate, diphenyliodoniumperfluoropentanesulfonate, diphenyliodonium perfluorooctanesulfonate,diphenyliodonium hexafluoroantimonate, diphenyliodoniumhexafluoroarsenate, bis-(t-butylphenyl)iodonium triflate,bis-(t-butylphenyl)-iodonium camphorsulfonate, α, α′-bis-sulfonyl-diazomethanes, bis(p-toluenesulfonyl)diazomethane, methylsulfonylp-toluenesulfonyldiazomethane,1-cyclohexylsulfonyl-1-(1,1-dimethylethylsulfonyl) diazomethane,bis(cyclohexylsulfonyl)diazomethane, trifluoromethanesulfonate esters ofimides hydroxyimides,(trifluoromethylsulfonyloxy)-bicyclo[2.2.1]hept-5-ene-2,3-dicarboximide(MDT),(5)nitrobenzyl sulfonate esters, 2-nitrobenzyl p-toluenesulfonate,2,6-dinitrobenzyl p-toluenesulfonate, 2,4-dinitrobenzylp-trifluoromethylbenzenesulfonate, sulfonyloxynaphthalimides,N-camphorsulfonyloxynaphthalimideN-pentafluorophenylsulfonyloxynaphthalimide, pyrogallol derivatives,trimesylate of pyrogallol, naphthoquinone-4-diazides, alkyl disulfones,s-triazine derivatives, sulfonic acid generators, it-butylphenyl-α-(p-toluenesulfonyloxy)-acetate,t-butyl-α-(p-toluenesulfonyloxy)acetate, N-hydroxy-naphthalimidedodecane sulfonate (DDSN), benzoin tosylate,

wherein T_(f)═CF₃S(O)₂O— and wherein R═CF₂CF₂CF₂CF₂H, CF₃, or CF₂CF₃.17. The method of claim 15, wherein said stabilizing/sensitizing agentis selected from the group consisting of

substituted 9-anthracenemethanols, phenothiazine, substitutedphenothiazines,

wherein each R⁷, R⁸, R⁹, R¹⁰, R¹¹, R¹², R¹³, R¹⁴, R¹⁵, and R¹⁶(R⁷- R¹⁶)is independently selected from the group consisting of a hydrogen atomand a hydrocarbyl substituent with a primary, a secondary or a tertiarycarbon attachment point, said hydrocarbyl group selected from the groupconsisting of an alkyl group having 1 to 20 carbon atoms, an alkenylgroup having 1 to 20 carbon atoms, an alkynyl group having 1 to 20carbon atoms, an aralkyl group having 1 to 20 carbon atoms, an alkarylhaving 1 to 20 carbon atoms and an aryl group having 1 to 20 carbonatoms; wherein the alkyl groups of the aralkyl and the alkaryl groupsmay be linear, branched or cyclic; and wherein any two R⁷-R¹⁵ in thesame molecule may be linked to form at least one carbon ring containing3 to 8 carbon atoms.
 18. The method of claim 10, said moldingcomposition further including a fluorinated release agent selected fromthe group consisting of vinyl 2,2,2-trifluoroethyl ether,

(R¹⁷)(R¹⁸)═(R¹⁹)OC_(n)(R²⁰)(R²¹)(D)(R²²)(R²³)(R²⁴), wherein D is acarbon atom, wherein n is 1, wherein R¹⁷, R¹⁸, R¹⁹, R²⁰ and R²¹ are H,and wherein R²², R²³ and R²⁴ are fluorine groups.
 19. The method ofclaim 10, wherein said backfill material is selected from the groupconsisting of: (1) a siloxane polymer, spin-on-glass,spin-on-organo-silicate glass silsesquioxanes having the formulas—(SiO₂)n-, a-(R′SiO_(3/2))n-, —(R′₂SiO)n- and —(R″Si₂O₃)n-, wherein R′is selected from the group consisting of an alkyl group having 1 to 3carbon atoms, an aryl group having 6 to 12 carbon atoms, and acycloalkyl group having 6 to 12 carbon atoms, and wherein R″ is selectedfrom the group consisting of an alkylene group having 1 to 2 carbonatoms and a cycloalkylene group having 6 to 12 carbon atoms; (2) apolymer containing at least 6 percent by weight of silicon, germanium,tin, titanium or other Group IVA/IVB metals; (3) one or more ofCH₂═CHOCH₂Si(CH₃)₃, CH₂═CHOCH₂CH₂Si(CH₃)₃, CH₂═CHOCH₂Si(CH₃)₂CH₂OCH═CH₂,CH₂═CHOCH₂Si(CH₃)₂OSi(CH₃)₂CH₂OCH═CH₂,CH₂═CHOCH₂CH₂Si(CH₃)₂CH₂CH₂OCH═CH₂,CH(CH₃)═CHOCH₂Si(CH₃)(CH₂OCH═CH(CH₃))CH₂OCH═CH(CH₃),CH₂═CHOCH₂CH₂Si(Si(CH₃)₃)₃, other silicon containing vinyl ethers and aphotoacid generator; and (4) silicon containing acrylates and radicalphotoinitiator.
 20. A method, comprising: forming a first adhesion layeron a substrate; forming on said adhesion layer, a transfer layer of atransfer composition; forming a second adhesion layer on said transferlayer; forming on said second adhesion layer a molding layer of amolding composition, said molding composition comprising one or morearomatic divinyl ethers; pressing a surface of a template into saidmolding layer, said template having a relief pattern on said surface,said molding layer filling voids in said relief pattern, said templatenot contacting said transfer layer; exposing said molding layer toactinic radiation, said actinic radiation converting said molding layerto a cured molding layer having thick and thin regions corresponding tosaid relief pattern; after exposing said molding layer to said actinicradiation, removing said template from said cured molding layer; afterremoving said template, filling said thin regions of said relief patternwith a backfill material; removing regions of said molding layer andsaid transfer layer not protected by said backfill material to exposeregions of said substrate; forming trenches in said exposed regions ofsaid substrate; after forming said trenches, removing any remainingmolding layer, backfill material and transfer layer; wherein saidtransfer composition comprises a thermosetting polymer, a thermoplasticpolymer, a polyepoxy polymer, a polyamide polymer, a polyimide polymer,a polyurethane polymer, a polycarbonate polymer, a polyester polymer,poly(vinylbenzoic acid) or combinations thereof; wherein said firstadhesion layer comprises a material selected from the group consistingof hexamethyldisilazane (HMDS) or ethylsilicate, ethylorthosilicate,tetraalkoxysilane, aminoethylaminopropyltrialkoxysilane,aminopropyltrialkoxysilane, aminoethyltrialkoxysilane,tetraalkoxytitanate or combinations thereof; wherein said secondadhesion layer comprises O-(vinyloxybutyl)-H-(triethoxysilylpropyl)-urethane or

wherein X is a linking group selected from the group consisting of—C(O)O—, —C(O)—, —OC(O)—, —O—C(O)—C(O)—O—, NHC(O)—O—, —O—C(O)—O—, alinear or a branched alkylene having 1 to 7 carbon atoms, acycloalkylene having 3 to 17 carbon atoms, an alkylcycloalkylene having4 to 20 acarbon atoms and a cycloalkylalkylene having 4 to 20 carbonatoms, wherein each R¹, R², R³, R⁴, R⁵, and R⁶(R¹- R⁶) is independentlyselected from the group consisting of a hydrogen atom and a hydrocarbylsubstituent with a primary, a secondary or a tertiary carbon attachmentpoint, said hydrocarbyl group selected from the group consisting of analkyl group, an alkenyl group, an alkynyl group, an aralkyl group, analkaryl and an aryl group, wherein each alkyl, alkenyl, alkynyl,aralkyl, alkaryl or aryl group has 1 to 20 carbon atoms and each alkylgroup of the aralkyl, or alkaryl groups may be linear, branched orcyclic, and wherein any two R¹-R⁶ in the same molecule may be linked toform the at least one carbon ring containing 3 to 8 carbon atoms;wherein said aromatic divinyl ethers are selected from the groupconsisting of

wherein said molding composition further includes a photoacid generatorand a stabilizing/sensitizing agent; wherein saidstabilizing/sensitizing agent is selected from the group consisting of

substituted 9-anthracenemethanols, phenothiazine, substitutedphenothiazines,

wherein each R⁷, R⁸, R⁹, R¹⁰, R¹¹, R¹², R¹³, R¹⁴, R¹⁵ and R¹⁶(R⁷-R¹⁶) isindependently selected from the group consisting of a hydrogen atom anda hydrocarbyl substituent with a primary, a secondary or a tertiarycarbon attachment point, said hydrocarbyl group selected from the groupconsisting of an alkyl group having 1 to 20 carbon atoms, an alkenylgroup having 1 to 20 carbon atoms, an alkynyl group having 1 to 20carbon atoms, an aralkyl group having 1 to 20 carbon atoms, an alkarylhaving 1 to 20 carbon atoms and an aryl group having 1 to 20 carbonatoms; wherein the alkyl groups of the aralkyl and the alkaryl groupsmay be linear, branched or cyclic; and wherein any two R⁷-R¹⁵ in thesame molecule may be linked to form at least one carbon ring containing3 to 8 carbon atoms; said molding composition further including afluorinated release agent selected from the group consisting of vinyl2,2,2-trifluoroethyl ether,

 (R¹⁷)(R¹⁸)═(R¹⁹)OC_(n)(R²⁰)(R²¹)(D)(R²²)(R²³)(R²⁴), wherein D is acarbon atom, wherein n is 1, wherein R¹⁷, R¹⁸, R¹⁹, R²⁰ and R²¹ are H,and R²², R²³ and R²⁴ are fluorine groups; and wherein said backfillmaterial is selected from the group consisting of: (1) a siloxanepolymer, spin-on-glass, spin-on-organo-silicate glass silsesquioxaneshaving the formulas —(SiO₂)n-, a —(R′SiO_(3/2))n-, —(R′₂SiO)n- and—(R″Si₂O₃)n-, wherein R′ is selected from the group consisting of analkyl group having 1 to 3 carbon atoms, an aryl group having 6 to 12carbon atoms, and a cycloalkyl group having 6 to 12 carbon atoms, andwherein R″ is selected from the group consisting of an alkylene grouphaving 1 to 2 carbon atoms and a cycloalkylene group having 6 to 12carbon atoms, (2) a polymer containing at least 6 percent by weight ofsilicon, germanium, tin, titanium or other Group IVA/IVB metals, (3) oneor more of CH₂═CHOCH₂Si(CH₃)₃, CH₂═CHOCH₂CH₂Si(CH₃)₃,CH₂═CHOCH₂Si(CH₃)₂CH₂OCH═CH₂, CH₂═CHOCH₂Si(CH₃)₂OSi(CH₃)₂CH₂OCH═CH₂,CH₂═CHOCH₂CH₂Si(CH₃)₂CH₂CH₂OCH═CH₂,CH(CH₃)═CHOCH₂Si(CH₃)(CH₂OCH═CH(CH₃))CH₂OCH═CH(CH₃),CH₂═CHOCH₂CH₂Si(Si(CH₃)₃)₃, other silicon containing vinyl ethers and aphotoacid generator; and (4) silicon containing acrylates and radicalphotoinitiator.
 21. The method of claim 1, wherein said relief patterncomprises grooves and plateaus and wherein said trenches correspond tosaid grooves in said relief pattern.
 22. The method of claim 1, whereinsaid molding layer is a single continuous layer.
 23. The method of claim10, wherein said relief pattern comprises grooves and plateaus andwherein said trenches correspond to said grooves in said relief pattern.24. The method of claim 10, wherein said molding layer is a singlecontinuous layer.